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Updated: May 22, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Partially coherent light-emitting diode illumination for video-rate in-line holographic microscopy
Paul Petruck1, Rainer Riesenberg, Richard Kowarschik
1Institute of Photonic Technology (IPHT) eV, Jena, Germany. paul.petruck@ipht-jena.de
Abstract:
The light of a light-emitting diode or a common thermal source, such as a tungsten filament lamp, is known to be quasi-incoherent. We generated partially coherent light of these sources with a volume of coherence in the micrometer range of 5-100 μm3 by spatial and spectral filtering. The corresponding degree of partial coherence was adapted for microscopic interference setups, such as a digital in-line holographic microscope. The practicability of the sources was determined by the spectral emittance and the resulting signal-to-noise ratio (SNR) of the detector. The microscale coherence in correlation with the SNR and its resolution for microscopy were analyzed. We demonstrate how low-light-level, non-laser sources enable holographic imaging with a video frame rate (25 frames/s), an intermediate SNR of 8 dB, and a volume of coherence of 3.4×10(4) μm3. Holograms of objects with a lateral resolution of 1 μm were achieved using a microscope lens (50×/NA=0.7) and a CCD camera featuring a 4-12 bit dynamic range.
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