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Scanning Electron Microscopy

Scanning Electron Microscopy

A scanning electron microscope (SEM) is used to study the surface features of a sample by using an electron beam that scans the sample surface in a two-dimensional manner. Typically, areas between ~1 centimeter to 5 micrometers in width can be imaged. SEM can be used to image bacteria, viruses, tissues as well as larger samples like insects. Conventional SEM gives a magnification ranging from 20X to 30,000X and spatial resolution of 50 to 100 nanometers.
Fundamental Principles
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Overview of Microscopy Techniques

Overview of Microscopy Techniques

The early pioneers of microscopy opened a window into the invisible world of microorganisms. In 1830, Joseph Jackson Lister created an essentially modern light microscope. The 20th century saw the development of microscopes that leveraged nonvisible light, such as fluorescence microscopy that uses an ultraviolet light source and electron microscopy that uses short-wavelength electron beams. These advances significantly improved magnification, image resolution, and contrast. By comparison, the...

Overview of Electron Microscopy

Overview of Electron Microscopy

The wavelengths of visible light ultimately limit the maximum theoretical resolution of images created by light microscopes. Most light microscopes can only magnify 1000X, and a few can magnify up to 1500X. Electrons, like electromagnetic radiation, can behave like waves, but with wavelengths of 0.005 nm, they produce significantly greater resolution up to 0.05 nm as compared to 500 nm for visible light. An electron microscope (EM) can create a sharp image that is magnified up to 2,000,000X.

Preparation of Samples for Electron Microscopy

Preparation of Samples for Electron Microscopy

To be visualized by an electron microscope, either transmission or scanning, biological samples need to be fixed (stabilized) so the electron beam does not destroy them and dried thoroughly (desiccated/dehydrated) so the vacuum does not affect them. Fixation needs to be done as quickly as possible because the sample properties will start changing as soon as it is removed from its natural environment. For example, in a tissue sample, the oxygen levels begin decreasing, causing an altered...

Transmission Electron Microscopy

Transmission Electron Microscopy

In 1931, physicist Ernst Ruska—building on the idea that magnetic fields can direct an electron beam just as lenses can direct a beam of light in an optical microscope—developed the first prototype of the electron microscope. This development led to the development of the field of electron microscopy. In the transmission electron microscope (TEM), electrons are produced by a hot tungsten element and accelerated by a potential difference in an electron gun, which gives them up to 400 keV in...

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Related Experiment Video

Updated: May 21, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope

Published on: May 28, 2016

Skirting effects in the variable pressure scanning electron microscope: limitations and improvements.

A Zoukel¹, L Khouchaf, J Di Martino

¹Univ-Lille Nord de France, Ecole des Mines de Douai, 941, rue Charles Bourseul BP 10838, 59500 Douai, France.

Micron (Oxford, England : 1993)

|June 12, 2012

Summary

Researchers developed a new method to enhance spatial resolution in scanning electron microscopy. This technique optimizes conditions for X-ray microanalysis and backscattered electron imaging in variable pressure environments.

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Last Updated: May 21, 2026

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Studying Dynamic Processes of Nano-sized Objects in Liquid using Scanning Transmission Electron Microscopy

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Published on: February 5, 2017

Area of Science:

Materials Science
Analytical Chemistry
Microscopy

Background:

Scanning electron microscopy (SEM) is crucial for material characterization.
Variable Pressure-Environmental SEM (VP-ESEM) allows imaging under non-vacuum conditions.
Improving spatial resolution in VP-ESEM modes is essential for detailed analysis.

Purpose of the Study:

To introduce a novel approach for enhancing spatial lateral resolution in X-ray microanalysis and backscattered electron (BSE) modes.
To establish a correlation between electron beam skirt radius in gas and signal generation volumes.
To identify optimal operating conditions for improved resolution in VP-ESEM.

Main Methods:

Investigated the relationship between electron beam skirt radius in gas (R(S)) and generation volume radii for X-ray signals (R(X)) and BSE (R(BSE)).
Utilized PMMA polymer, silicon oxide, and aluminum as test materials.
Performed simulations to determine optimal lateral resolution conditions (R(P,E)) based on pressure (P) and energy (E).

Main Results:

Simulations revealed that optimal lateral resolution conditions exist for each material.
These optimal conditions, denoted as R(P,E), are dependent on gas pressure and electron beam energy.
The study established a clear relationship between R(S), R(X), and R(BSE) under varying experimental parameters.

Conclusions:

The proposed approach effectively addresses the limitations in spatial resolution for VP-ESEM.
This method enables the proposal of optimal experimental conditions for characterizing diverse materials.
Enhanced resolution in VP-ESEM will improve the accuracy and detail of microanalysis and imaging.