Related Experiment Video
Updated: May 21, 2026
05:49
Laser Micromachining for Polymer Surface Topography Design
Published on: September 19, 2025
Laser etching of groove structures with micro-optical fiber-enhanced irradiation
Dameng Liu1, Jiachen Liu, Hui Wang
1State Key Laboratory of Tribology, Tsinghua University, Beijing, 100084, China. ldm@tsinghua.edu.cn.
Nanoscale Research Letters
|June 21, 2012
Abstract:
A microfiber is used as a laser-focusing unit to fabricate a groove structure on TiAlSiN surfaces. After one laser pulse etching, a groove with the minimum width of 265 nm is manufactured at the area. This technique of microfabricating the groove in microscale is studied. Based on the near-field intensity enhancement at the contact area between the fiber and the surface during the laser irradiation, simulation results are also presented, which agree well with the experimental results.
