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Published on: January 23, 2013
Nano-cube MgO formed on silicon substrate using pulsed laser deposition
Satoru Kaneko1, Takeshi Ito, Kensuke Akiyama
1Kanagawa Industrial Technology Research Institute, Kanagawa Prefectural Government, 705-1 Shimo-Imaizumi, Ebina, Kanagawa 243-0435, Japan.
Journal of Nanoscience and Nanotechnology
|July 5, 2012
Summary
Pulsed laser deposition created nano-cube magnesium oxide (MgO) particles on silicon (Si) substrates. Annealing transformed these particles into round shapes, revealing epitaxial growth with a cubic-on-cubic arrangement.
Area of Science:
- Materials Science
- Nanotechnology
- Surface Science
Background:
- Epitaxial growth of magnesium oxide (MgO) on silicon (Si) substrates is crucial for advanced electronic and optical applications.
- Achieving high-quality, continuous MgO films on Si(001) presents challenges due to lattice mismatch and surface interactions.
Purpose of the Study:
- To investigate the formation and structural characteristics of MgO films deposited on Si(001) substrates using pulsed laser deposition.
- To analyze the morphology and phase evolution of MgO nanoparticles under different conditions, including annealing.
Main Methods:
- Pulsed laser deposition (PLD) of an MgO target onto Si(001) substrates at elevated temperatures and controlled oxygen pressures.
- Surface characterization using Atomic Force Microscopy (AFM) to observe morphology.
- Chemical and structural analysis using X-ray Photoelectron Spectroscopy (XPS) and X-ray Diffraction (XRD).
Main Results:
- MgO films exhibited a (001) preferred orientation on Si(001) substrates, indicating cubic-on-cubic epitaxial growth.
- XPS analysis revealed that the deposited MgO did not form a continuous film, but rather scattered nano-cube particles on the Si surface.
- AFM imaging confirmed the presence of nano-cube MgO particles, which transformed into round shapes after annealing.
- XRD confirmed the epitaxial relationship: MgO[100] parallel to Si[100].
Conclusions:
- Pulsed laser deposition can yield epitaxially grown MgO(001) on Si(001) with a cubic-on-cubic arrangement.
- The formation of discrete MgO nanoparticles rather than a continuous film was observed, with shape transformation upon annealing.
- The study provides insights into controlling MgO nanostructures on silicon for potential device applications.

