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Updated: May 20, 2026

Automated Delivery of Microfabricated Targets for Intense Laser Irradiation Experiments
Published on: January 28, 2021
G M Burrow1, M C R Leibovici, J W Kummer
1School of Electrical and Computer Engineering, Georgia Institute of Technology, Atlanta, Georgia 30332-0250, USA.
A new pattern-integrated interference lithography (PIIL) system enables precise sub-micron patterning for advanced applications. This method integrates imaging with interference lithography for fabricating photonic crystals and other subwavelength structures.
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