Related Experiment Video
Updated: May 20, 2026
Fabrication and Operation of Acoustofluidic Devices Supporting Bulk Acoustic Standing Waves for Sheathless Focusing of Particles
Published on: March 6, 2016
Porous silicon bulk acoustic wave resonator with integrated transducer
Gazi N Aliev1, Bernhard Goller, Paul A Snow
1Department of Physics, University of Bath, UK. g.aliev@bath.ac.uk.
Abstract:
: We report that porous silicon acoustic Bragg reflectors and AlN-based transducers can be successfully combined and processed in a commercial solidly mounted resonator production line. The resulting device takes advantage of the unique acoustic properties of porous silicon in order to form a monolithically integrated bulk acoustic wave resonator.
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