You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: May 19, 2026

Non-equilibrium Microwave Plasma for Efficient High Temperature Chemistry
Published on: August 1, 2017
A J R van den Boogaard1, F A van Goor, E Louis
1FOM Institute for Plasma Physics Rijnhuizen, Nieuwegein, The Netherlands. a.j.r.vandenboogaard@rijnhuizen.nl
Researchers developed a Mo/Si multilayer-grating system for extreme ultraviolet (EUV) lithography. This system achieves high reflectance and spectral filtering, offering a solution for out-of-band radiation suppression.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: