Morphology control in block copolymer films using mixed solvent vapors.

Kevin W Gotrik1, Adam F Hannon, Jeong Gon Son

  • 1Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, United States.

ACS Nano
|August 30, 2012
PubMed
Summary

Solvent vapor annealing of block copolymer films creates diverse morphologies beyond equilibrium states. Controlling solvent vapor pressure and flow rates allows for precise morphology prediction in lithography.