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Morphology control in block copolymer films using mixed solvent vapors.
Kevin W Gotrik1, Adam F Hannon, Jeong Gon Son
1Department of Materials Science and Engineering, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, United States.
Solvent vapor annealing of block copolymer films creates diverse morphologies beyond equilibrium states. Controlling solvent vapor pressure and flow rates allows for precise morphology prediction in lithography.
Area of Science:
- Materials Science
- Polymer Science
- Nanotechnology
Background:
- Block copolymer thin films exhibit morphologies influenced by processing conditions.
- Solvent vapor annealing (SVA) offers a route to control nanostructure formation.
- Equilibrium bulk morphology may not be achievable or desirable in thin films.
Purpose of the Study:
- To investigate the effect of solvent vapor annealing conditions on block copolymer thin film morphologies.
- To establish phase maps correlating morphology with solvent vapor pressure and annealing parameters.
- To understand the role of solvent-induced swelling in morphology development.
Main Methods:
- Systematic variation of solvent vapor (toluene, n-heptane) flow rates and inert gas flow.
- Construction of morphology phase maps for polystyrene-block-polydimethylsiloxane diblock copolymers.
- Correlation of final morphology with film swelling and annealing conditions.
- Modeling of solvent swelling effects using self-consistent field theory.
Main Results:
- Phase maps reveal distinct morphology regions based on solvent vapor pressure and annealing parameters.
- Film swelling is directly correlated with solvent vapor annealing conditions and influences final morphology.
- A range of non-equilibrium morphologies can be accessed through controlled SVA.
- Self-consistent field theory successfully models the impact of solvent swelling.
Conclusions:
- Solvent vapor annealing provides a versatile method for controlling block copolymer thin film morphologies.
- The established phase maps offer a predictive framework for achieving desired nanostructures.
- Understanding swelling is crucial for tailoring morphologies for applications like nanolithography.
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