Separation of ion components produced by plasma-assisted catalytic ionization

W Oohara1, T Hibino, T Higuchi

  • 1Department of Electronic Device Engineering, Yamaguchi University, Ube 755-8611, Japan.

Summary

Plasma-assisted catalytic ionization produces positive and negative hydrogen ions using a nickel plate. Researchers controlled ion production and flux balance by adjusting irradiation current density and energy.

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