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Three-dimensional AlZnO/Al2O3/AlZnO nanocapacitor arrays on Si substrate for energy storage

Lian-Jie Li1, Bao Zhu, Shi-Jin Ding

  • 1State Key Laboratory of ASIC and System, School of Microelectronics, Fudan University, Shanghai 200433, People's Republic of China. sjding@fudan.edu.cn.

Nanoscale Research Letters
|October 4, 2012
PubMed

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