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Updated: May 18, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
07:51

Fabrication of Silica Ultra High Quality Factor Microresonators

Published on: July 2, 2012

High quality factor and high confinement silicon resonators using etchless process.

Austin Griffith1, Jaime Cardenas, Carl B Poitras

  • 1School of Applied and Engineering Physics, Cornell University, Ithaca, NY 14853, USA.

Optics Express
|October 6, 2012
PubMed
Summary
This summary is machine-generated.

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High-quality silicon ring resonators were fabricated using thermal oxidation. These resonators exhibit a high quality factor of 760,000 and excellent light confinement, crucial for integrated photonics.

Area of Science:

  • Photonics and Optical Engineering
  • Materials Science
  • Semiconductor Devices

Background:

  • Silicon photonics is a rapidly growing field for integrated optical circuits.
  • Ring resonators are key components for various photonic applications, including filtering and sensing.
  • Achieving high quality factors and confinement is essential for device performance.

Purpose of the Study:

  • To demonstrate a high quality factor and high confinement silicon ring resonator.
  • To investigate the performance of resonators fabricated using a thermal oxidation process.
  • To analyze the propagation loss and effective indices of the guided modes.

Main Methods:

  • Fabrication of a silicon ring resonator with a 50 μm bending radius and a 5 μm coupling region.

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Last Updated: May 18, 2026

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  • Utilizing a thermal oxidation process for fabrication.
  • Characterization of the resonator's optical properties, including quality factor and effective indices.

    • Main Results:

    • Achieved an intrinsic quality factor of 760,000 for the fundamental TM mode.
    • Measured a propagation loss of 0.9 dB/cm.
    • Observed high confinement for both fundamental TE and TM modes with effective indices of 3.0 and 2.9, respectively.

    Conclusions:

    • The thermal oxidation process enables the fabrication of high-performance silicon ring resonators.
    • The demonstrated resonator exhibits excellent optical properties suitable for integrated photonic applications.
    • High quality factor and confinement are critical for advancing silicon photonic devices.