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Updated: May 17, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
Aleksandr Biberman1, Michael J Shaw, Erman Timurdogan
1Research Laboratory of Electronics, Massachusetts Institute of Technology, 77 Massachusetts Avenue, Cambridge, Massachusetts 02139, USA.
Silicon ring resonators achieved record low propagation losses of 2.7 dB/m, limited by bend loss. This indicates further improvements in silicon photonics are possible, pushing beyond current propagation loss limits.
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