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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

Published on: July 5, 2016

Uncertainty-managed phase-shifting digital holography.

Joonku Hahn¹, Hwi Kim

¹School of Electronics Engineering, Kyungpook National University, Daegu, South Korea.

|November 2, 2012

Summary

This summary is machine-generated.

Phase-shifting digital holography accuracy is improved by a new method that accounts for signal phase uncertainty, enhancing measurements even with reference phase variations. This digital measurement technology offers better precision.

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Area of Science:

Optics and Photonics
Digital Measurement Technologies

Background:

Phase-shifting digital holography (PSDH) is a technique for complex optical field profiling using focal plane array detectors.
Current PSDH accuracy is primarily limited by the reference phase tolerance.

Purpose of the Study:

To analyze the factors affecting measurement uncertainty in PSDH.
To propose an improved PSDH scheme that enhances accuracy under reference phase tolerance.

Main Methods:

Performed uncertainty analysis on the expected signal in PSDH.
Developed a novel PSDH scheme leveraging signal phase uncertainty properties.

Main Results:

Measurement uncertainty is dependent on both signal phase and reference phase tolerance.
The proposed scheme significantly enhances measurement accuracy despite substantial reference phase tolerance.

Conclusions:

Understanding signal phase uncertainty is crucial for improving PSDH.
The novel PSDH scheme offers a robust solution for accurate optical field measurement in challenging conditions.