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Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
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A novel two-axis MEMS scanning mirror with a PZT actuator for laser scanning projection

Chung-De Chen1, Yu-Jen Wang, Pin Chang

  • 1Industrial Technology Research Institute No. 31, Annan District, Tainan, Taiwan.

Optics Express
|November 29, 2012
PubMed

Keywords:
MEMS scanning mirrorPZT actuatorlaser projectionoptical scanningMEMS fabrication

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