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Updated: May 16, 2026

Preparation of Silicon Nanowire Field-effect Transistor for Chemical and Biosensing Applications
Published on: April 21, 2016
Investigation into the effect of varied functional biointerfaces on silicon nanowire MOSFETs
Shu-Ping Lin1, Tien-Yin Chi, Tung-Yen Lai
1Graduate Institute of Biomedical Engineering, National Chung Hsing University, 250 Kuo-Kuang Road, Taichung 40227, Taiwan. splin@dragon.nchu.edu.tw
Abstract:
A biocompatible and functional interface can improve the sensitivity of bioelectronics. Here, 3-aminopropyl trimethoxysilane (APTMS) and 3-mercaptopropyl trimethoxysilane (MPTMS) self-assembled monolayers (SAMs) were independently modified on the surface of silicon nanowire metal-oxide-semiconductor field effect transistors (NW-MOSFETs). Those SAMs-modified silicon NW-MOSFETs were used to discriminate various pH solutions and further verify which modified regime was capable of providing better electrical signals. The APTMS-SAM modified NW-MOSFETs showed better electrical responses in pH sensing. Biomolecules on APTMS-SAM modified NW-MOSFETs also gave better signals for the corresponding proteind in physiological buffer solutions. Atomic force microscopy (AFM) clarified those electrical phenomena and found biomolecules on APTMS-SAM were relatively uniformly modified on NW-MOSFETs. Our results showed that more uniform modification contributed to better signal response to protein interactions in physiological buffer solutions. It suggests that suitable surface modifications could profoundly affect the sensing response and sensitivity.
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