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Focused Ion Beam Fabrication of LiPON-based Solid-state Lithium-ion Nanobatteries for In Situ Testing
Published on: March 7, 2018
Architecturing hierarchical function layers on self-assembled viral templates as 3D nano-array electrodes for
Yihang Liu1, Wei Zhang, Yujie Zhu
1Department of Chemical and Biomolecular Engineering, University of Maryland, College Park, Maryland 20742, USA.
Nano Letters
|December 21, 2012
Summary
Researchers developed 3D microbatteries using genetically modified tobacco mosaic virus (TMV) templates for advanced microelectronics. These novel microbatteries offer high energy density and stable cycling, rivaling conventional lithium-ion batteries.
Area of Science:
- Materials Science
- Nanotechnology
- Electrochemistry
Background:
- Microelectronic devices require compact and efficient integrated power sources.
- Conventional batteries face limitations in miniaturization and on-site manufacturability for microelectromechanical systems (MEMS).
Purpose of the Study:
- To engineer 3D microbattery arrays as integral power sources for microelectronics.
- To achieve high power and energy densities with excellent cycle life on a minimal footprint.
Main Methods:
- Hierarchical architecting of functional material multilayers over genetically modified tobacco mosaic virus (TMV) templates.
- Vertical self-assembly of TMV templates on current collectors.
- Fabrication of LiFePO(4) nanoforests with shell-core-shell structure and integrated nanometric metal core.
Main Results:
- Achieved optimum power and energy densities with excellent cycle life.
- Demonstrated microbatteries rivaling conventional lithium-ion batteries in energy density and cycling stability.
- Provided superior rate performance per footprint and on-site manufacturability.
Conclusions:
- This bottom-up approach offers an elegant solution for engineering 3D microbattery arrays.
- The developed microbatteries are suitable for microelectromechanical systems (MEMS) and integrated circuit (IC) applications.
- This method opens new avenues for fabricating integral electrochemical components within microelectronic systems.

