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Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments
11:47

Characterization of Surface Modifications by White Light Interferometry: Applications in Ion Sputtering, Laser Ablation, and Tribology Experiments

Published on: February 27, 2013

Application of white-light scanning interferometer on transparent thin-film measurement

Meng-Chi Li1, Der-Shen Wan, Cheng-Chung Lee

  • 1Thin Film Technology Center/Department of Optics and Photonics, National Central University, Chung-Li, Taiwan.

Applied Optics
|December 25, 2012
PubMed

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