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Updated: May 15, 2026

Fabrication and Characterization of High-Q Silicon Nitride Membrane Resonators
Published on: August 8, 2025
Optical instability and self-pulsing in silicon nitride whispering gallery resonators
Christophe Baker1, Sebastian Stapfner, David Parrain
1Université Paris Diderot, Sorbonne Paris Cité, Laboratoire Matériaux et Phénomènes Quantiques, CNRS-UMR 7162, 10 rue Alice Domon et Léonie Duquet, 75013 Paris, France. christophe.baker@univ-paris-diderot.fr
Abstract:
We report time domain observations of optical instability in high Q silicon nitride whispering gallery disk resonators. At low laser power the transmitted optical power through the disk looks chaotic. At higher power, the optical output settles into a stable self-pulsing regime with periodicity ranging from hundreds of milliseconds to hundreds of seconds. This phenomenon is explained by the interplay between a fast thermo-optic nonlinearity within the disk and a slow thermo-mechanic nonlinearity of the structure. A model for this interplay is developed which provides good agreement with experimental data and points out routes to control this instability.

