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Updated: May 14, 2026

Quantifying X-Ray Fluorescence Data Using MAPS
Published on: February 17, 2018
[Methods of detector response function establishment in X-ray fluorescence spectra analysis].
Zhe Li1, Xian-Guo Tuo, Jian-Bo Yang
1State Key Laboratory of Geoharzard Prevention and Geoenvironment Protection, Chengdu University of Technology, Chengdu 610059, China. lizhe3017@163.com
Establishing the detector response function (DRF) improves X-ray fluorescence spectra analysis speed and accuracy. This paper discusses DRF modeling methods for semiconductor detectors, aiding X-ray analysis techniques.
Area of Science:
- Nuclear Physics
- Materials Science
Context:
- X-ray fluorescence (XRF) spectroscopy is crucial for elemental analysis.
- Accurate analysis of XRF spectra relies on understanding detector characteristics.
Purpose:
- To explore and compare methods for establishing the detector response function (DRF) in semiconductor detectors.
- To provide foundational data for advanced X-ray analysis techniques.
Summary:
- Discusses theories and models for semiconductor DRF, including methods for establishing three typical models.
- Details the calculation of key parameters like full energy peak standard deviation and Fano factor.
- Summarizes and contrasts existing studies on DRF modeling for XRF measurements.
Impact:
- Enhances the speed, accuracy, and automation of XRF spectral analysis.
- Offers recommendations for optimal DRF modeling methods in XRF applications.
- Provides essential data for improving the reliability of elemental analysis using XRF.
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