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Continuous and nanostructured TiO2 films grown by dc sputtering magnetron
O Sánchez1, L Vergara, A Climent Font
1Instituto Ciencia Materiales Madrid (CSIC), Campus Cantoblanco, 28049 Madrid, Spain.
Journal of Nanoscience and Nanotechnology
|March 2, 2013
Summary
Vertically aligned Anatase titanium dioxide (TiO2) nanostructures were grown using sputtering and annealing on porous templates. This method creates ordered nanostructures with unique optical properties and tunable band gaps.
Area of Science:
- Materials Science
- Nanotechnology
- Thin Film Deposition
Background:
- Titanium dioxide (TiO2) nanostructures are crucial for various applications.
- Controlling the morphology and ordering of TiO2 nanostructures is challenging.
- Porous Anodic Alumina (PAA) films offer a templating approach for ordered nanostructures.
Purpose of the Study:
- To report the growth of Anatase TiO2 nanostructured films.
- To utilize PAA films as templates for vertically aligned TiO2 nanostructures.
- To investigate the structural, morphological, and optical properties of the synthesized TiO2 nanostructures.
Main Methods:
- DC reactive magnetron sputtering for TiO2 deposition.
- Post-annealing treatment for Anatase phase formation.
- Using Porous Anodic Alumina (PAA) films as templates with modified pore diameters.
- Characterization using grazing incidence X-ray diffraction (GIXRD), Rutherford backscattering spectrometry (RBS), Field Emission Gun scanning electron microscopy (FEG-SEM), and UV-Visible reflectance spectroscopy.
Main Results:
- Formation of vertically aligned and spatially ordered Anatase TiO2 nanostructures.
- Successful replication of the underlying PAA template structure.
- Determination of crystalline structure and Ti concentration profile.
- Observation of distinct optical properties, including varied band gap values and complex light absorption features in the UV-visible range.
Conclusions:
- The synthesis method effectively produces ordered Anatase TiO2 nanostructures.
- The resulting nanostructures exhibit tunable optical properties.
- This templated growth approach is promising for fabricating functional TiO2 nanomaterials.
