Performance of an inverted ion source.

M C Salvadori1, F S Teixeira, L G Sgubin

  • 1Institute of Physics, University of São Paulo, C.P. 66318, CEP 05315-970, São Paulo S.P., Brazil. mcsalva@if.usp.br

Summary

Researchers developed an inverted ion source, grounding the plasma and using a negative potential for energetic ion beams. This cost-effective design enables applications like small-scale ion implantation.

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