Tilt-ellipsometry of object surface by specular reflection for three-dimensional shape measurement

Area of Science:

• Optics
• Surface Science
• Metrology

Background:

• Traditional methods for geometrical shape study of glossy objects can lack precision.
• Ellipsometry is a powerful optical technique for characterizing thin films and surfaces.

Purpose of the Study:

• To develop a precise surface normal vector detection method using specular reflection ellipsometry.
• To enable accurate geometrical shape studies of glossy objects.

Main Methods:

• Reworking ellipsometry by specular reflection as a surface normal vector detection technique.
• Illuminating the object with circularly polarized light.
• Analyzing the reflection polarization ellipse (azimuth and ellipticity) to determine surface orientation.

Main Results:

• The surface normal vector was precisely detected, enabling geometrical shape analysis.
• Azimuth and ellipticity of the reflection polarization ellipse were correlated with the incident plane and angle of incidence.
• Experimental demonstration of the tilt-ellipsometry principle using metallic polygon and cube samples.

Conclusions:

• Specular reflection ellipsometry is a viable and precise method for surface normal vector detection.
• This technique offers a new approach for the geometrical shape study of glossy objects.
• The demonstrated tilt-ellipsometry principle provides a foundation for advanced surface analysis.