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Postanalyses of an optical multilayer interference filter using numerical reverse synthesis and Rutherford
Naba Kishore Sahoo1, Sanjiv Kumar, Raj Bahadur Tokas
1Applied Spectroscopy Division, Bhabha Atomic Research Centre, Trombay, Mumbai, India. nksahoo@barc.gov.in
Applied Optics
|April 3, 2013
Summary
This study analyzes dielectric multilayer filters using advanced techniques to understand how deposition conditions affect layer properties. Real-time deposition significantly impacts layer density and refractive index, influencing filter performance.
Area of Science:
- Materials Science
- Optical Engineering
- Thin Film Technology
Background:
- All-dielectric multilayer Fabry-Perot interference filters are crucial optical components.
- Their performance is highly sensitive to the precise physical and optical properties of individual layers.
- Understanding the relationship between deposition processes and layer characteristics is essential for filter optimization.
Purpose of the Study:
- To comprehensively characterize an all-dielectric multilayer Fabry-Perot interference filter fabricated via reactive electron beam deposition.
- To investigate the influence of real-time deposition parameters on microscopic layer properties (density, refractive index).
- To establish a correlation between deposition conditions, layer characteristics, and the overall spectral performance of the filter.
Main Methods:
- Numerical reverse engineering of transmission spectra.
- Rutherford backscattering spectroscopy (RBS) for elemental composition and stoichiometry.
- Quartz crystal monitoring for in-situ thickness and deposition rate.
- Analysis of TiO2 and SiO2 layer properties.
Main Results:
- Multilayer geometry, layer thicknesses, densities, refractive indices, compositions, and stoichiometry were successfully derived.
- Real-time deposition parameters significantly influenced the densities and refractive indices of TiO2 and SiO2 layers.
- Layer density was strongly correlated with oxygen stoichiometry (substoichiometric, stoichiometric, superstoichiometric).
- Deviations in microscopic parameters directly impacted physical layer thicknesses and spectral characteristics.
Conclusions:
- Nondestructive analyses and numerical reverse engineering provide a robust method for characterizing multilayer filters.
- Real-time deposition control is critical for achieving desired layer densities and refractive indices in dielectric filters.
- Oxygen stoichiometry plays a vital role in determining the mass densities of refractory oxide layers, impacting filter performance.
