Flux concentration and modulation based magnetoresistive sensor with integrated planar compensation coils

1∕f noise is one of the main noise sources of magnetoresistive (MR) sensors, which can cause intrinsic detection limit at low frequency. To suppress this noise, the solution of flux concentration and vertical motion modulation (VMM) has been proposed. Magnetic hysteresis in MR sensors is another problem, which degrades their response linearity and detection ability. To reduce this impact, the method of pulse magnetization and magnetic compensation field with integrated planar coils has been introduced. A flux concentration and VMM based magnetoresistive prototype sensor with integrated planar coils was fabricated using microelectromechanical-system technology. The response linearity of the prototype sensors is improved from 0.8% to 0.12%. The noise level is reduced near to the thermal noise level, and the low-frequency detection ability of the prototype sensor is enhanced with a factor of more than 80.