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Updated: May 12, 2026

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Silicon carbide microdisk resonator.

Xiyuan Lu1, Jonathan Y Lee, Philip X-L Feng

  • 1Department of Physics and Astronomy, University of Rochester, Rochester, New York 14627, USA.

Optics Letters
|April 19, 2013
PubMed
Summary
This summary is machine-generated.

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We fabricated a silicon carbide microdisk resonator with a high optical quality factor. Its temperature dependence was characterized, revealing a thermo-optic coefficient suitable for optomechanical applications.

Area of Science:

  • Materials Science
  • Optics
  • Nanotechnology

Background:

  • Silicon carbide (SiC) is a promising material for photonic devices due to its unique optical and mechanical properties.
  • Microdisk resonators offer high quality factors and small mode volumes, making them suitable for various photonic applications.

Purpose of the Study:

  • To demonstrate a silicon carbide microdisk resonator on a 3C-SiC-on-Si platform.
  • To characterize the thermo-optic properties of 3C-SiC.
  • To assess the potential of the device for cavity optomechanics.

Main Methods:

  • Fabrication of a silicon carbide microdisk resonator.
  • Optical characterization of the resonator's quality factor.
  • Temperature dependence measurements of cavity resonance.

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  • Finite-difference time-domain (FDTD) simulations.

    • Main Results:

    • Achieved an intrinsic optical quality factor of 6.19×10^3 for the SiC microdisk resonator.
    • Determined the thermo-optic coefficient of 3C-SiC to be 2.92×10^-5 /K.
    • Simulations indicated significant potential for cavity optomechanical applications.

    Conclusions:

    • The fabricated SiC microdisk resonator demonstrates excellent optical performance.
    • The measured thermo-optic coefficient is valuable for thermal management in SiC photonic devices.
    • The device shows promise for future cavity optomechanical systems.