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Reflection coefficient monitoring for optical interference coating depositions
Cheng-Chung Lee1, Kai Wu, Meng-Yen Ho
1Department of Optics and Photonics/Thin Film Technology Center, National Central University, Chung-Li 32001, Taiwan. cclee@dop.ncu.edu.tw
Optics Letters
|April 19, 2013
Summary
This study introduces a real-time reflection coefficient monitoring technique for multilayer interference coatings. This method enhances accuracy and stability, improving design proximity by 82% compared to conventional broadband monitoring.
Area of Science:
- Optical Engineering
- Materials Science
- Thin Film Technology
Background:
- Multilayer interference coatings are crucial in optical systems.
- Accurate monitoring during deposition is essential for achieving desired optical properties.
- Conventional monitoring methods can suffer from instability and ambiguity.
Purpose of the Study:
- To develop a robust real-time monitoring technique for multilayer interference coatings.
- To improve the accuracy and stability of the deposition process.
- To enhance the proximity to the designed optical performance.
Main Methods:
- Acquisition of real-time reflection coefficient (phase and amplitude) at normal incidence.
- Utilizing the real-time spectrum from a broadband optical monitor.
- Implementing a monitoring method with high stability and error compensation.
Main Results:
- The reflection coefficient monitoring technique demonstrated high stability.
- The method exhibited good error compensation ability, eliminating deposition termination ambiguity.
- Experimental results showed a significant improvement, bringing the coatings 82% closer to the design compared to conventional broadband monitoring.
Conclusions:
- Real-time reflection coefficient monitoring is a powerful technique for multilayer interference coatings.
- The proposed method offers superior performance, stability, and accuracy.
- This advancement significantly improves the precision of thin film deposition.
