You might also read
Articles linked to this work by shared authors, journal, and citation graph.
Updated: May 11, 2026

Comprehensive Characterization of Extended Defects in Semiconductor Materials by a Scanning Electron Microscope
Published on: May 28, 2016
1CEIT and Tecnun (University of Navarra), Manuel de Lardizábal 15, 20018 San Sebastián, Spain. jalkorta@ceit.es
High resolution electron backscattered diffraction (HREBSD) can determine crystal orientation and stress. However, phantom stresses arise from pattern center calibration issues, making absolute stress determination unfeasible with a single detector.
Area of Science:
Background:
Purpose of the Study:
Main Methods:
Main Results:
Conclusions: