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Related Experiment Video

Updated: May 11, 2026

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters
15:25

Design and Characterization Methodology for Efficient Wide Range Tunable MEMS Filters

Published on: February 4, 2018

Tunable MEMS axicon mirror arrays.

Jens Brunne1, Ulrike Wallrabe

  • 1Laboratory for Microactuators, Department of Microsystems Engineering, IMTEK, University of Freiburg, Georges-Koehler-Allee 102, Freiburg 79110, Germany.

Optics Letters
|June 1, 2013
PubMed
Summary
This summary is machine-generated.

Researchers developed the first tunable array of reflective microelectromechanical systems (MEMS) microaxicon mirrors. These novel micro-optics can generate quasi-nondiffracting beams for diverse applications.

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Area of Science:

  • Optics and Photonics
  • Microelectromechanical Systems (MEMS)

Background:

  • Highly aspheric reflective micro-optics are crucial for generating quasi-nondiffracting beams.
  • Fabricating tunable arrays of these micro-optical elements has been a significant challenge.

Purpose of the Study:

  • To demonstrate the first array of purely reflective, tunable microelectromechanical systems (MEMS) microaxicon mirrors.
  • To enable the generation of quasi-nondiffracting beams with tunable optical elements.

Main Methods:

  • Utilized microelectromechanical systems (MEMS) technology for fabrication.
  • Implemented a solid-state design based on thermal expansion for actuation.
  • Created microaxicon mirrors with a continuous conical surface.

Main Results:

  • Successfully fabricated a tunable array of reflective microaxicon mirrors.
  • Demonstrated a wide tuning range, allowing for large conical angles.
  • Achieved the formation of both concave and convex axicons.
  • Characterized mirror deflection and quasi-Bessel beam propagation.

Conclusions:

  • The developed MEMS microaxicon mirrors represent a breakthrough in tunable micro-optics.
  • This technology enables the creation of quasi-nondiffracting beams with unprecedented control.
  • The device offers potential for a wide range of applications requiring precise beam shaping.