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Updated: May 9, 2026

Characterization of SiN Integrated Optical Phased Arrays on a Wafer-Scale Test Station
Published on: April 1, 2020
Jianxin Li1, Rihong Zhu, Lei Chen
1School of Electronic Engineering and Optoelectronic Technology, Nanjing University of Science and Technology, Nanjing, China. ljx@vip.163.com
This study introduces phase-tilting interferometry to accurately retrieve phase information from optical testing interferograms, even with random tilts. The method offers high accuracy and robustness for precise measurements, even without a phase shifter.
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