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Updated: May 8, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Zhaolou Cao1, Keyi Wang, Qinglin Wu
1Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei, China.
A novel scanning optical probe system measures logarithmic axicons with subwavelength resolution. This method accurately determines the phase retardation function for quasi-nondiffracting beams.
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