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Related Concept Videos

IR Spectrometers01:25

IR Spectrometers

There are two main infrared (IR) spectrophotometers: dispersive IR spectrometers and Fourier transform infrared (FTIR) spectrometers. In a dispersive IR spectrometer, a beam of infrared radiation produced by a hot wire is divided into two parallel equal-intensity beams using mirrors. One beam passes through the sample, while another is a reference beam. The beams then move through the monochromator, which separates the radiations into a continuous spectrum of different frequencies. The...

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Orthogonal polarization Mirau interferometer using reflective-type waveplate.

Abraham Mario Tapilouw1, Liang-Chia Chen, Yi-Jun Jen

  • 1Mechanical Engineering Department, National Taiwan University, Taipei, Taiwan.

Optics Letters
|August 14, 2013
PubMed
Summary
This summary is machine-generated.

This study introduces a novel orthogonal polarization Mirau interferometer. It achieves higher fringe contrast and improved calibration for step height and solder bump measurements.

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Area of Science:

  • Optical metrology
  • Interferometry
  • Nanotechnology

Background:

  • Traditional Mirau interferometers face limitations in measuring certain microstructures like solder bumps.
  • Achieving high interferometric fringe contrast is crucial for accurate measurements.
  • Controlling polarization states is key to enhancing interferometric performance.

Purpose of the Study:

  • To develop an orthogonal polarization Mirau interferometer for enhanced metrology.
  • To improve the measurement accuracy of standard step heights.
  • To enable the measurement of challenging samples such as solder bumps.

Main Methods:

  • Utilizing a reflective-type half-waveplate in the reference arm to generate orthogonal polarization states.
  • Implementing broadband white light interferometry.
  • Adjusting the light intensity ratio between object and reference arms.

Main Results:

  • The developed interferometer successfully generates orthogonal polarization for object and reference light.
  • Maximized interferometric fringe contrast was achieved by controlling light intensity ratios.
  • Demonstrated superior accuracy in standard step height calibration.
  • Successfully measured solder bumps, a capability lacking in traditional setups.

Conclusions:

  • The orthogonal polarization Mirau interferometer offers enhanced measurement capabilities.
  • This technique provides a more accurate method for step height calibration.
  • The developed interferometer expands the application range of Mirau interferometry to include solder bump analysis.