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Updated: May 8, 2026

Scanning-probe Single-electron Capacitance Spectroscopy
Published on: July 30, 2013
M Moertelmaier1, H P Huber, C Rankl
1Agilent Technologies Austria GmbH, Measurement Research Laboratory, Gruberstrasse 40, 4020 Linz, Austria.
A novel scanning sawtooth capacitance spectroscopy (SSCS) method generates capacitance/voltage (C-V) maps using a scanning microwave microscope. This technique rapidly acquires thousands of C-V curves for semiconductor and other material characterization.
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