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Published on: June 15, 2022
P K Shreeman1, K A Dunn, S W Novak
1College of Nanoscale Science and Engineering, University at Albany-SUNY , 257 Fuller Road, Albany, NY 12203, USA.
A modified statistical dynamical diffraction theory (mSDDT) accurately analyzes X-ray diffraction scans for thin films. This advanced method provides structural insights for materials ranging from defect-free to those with increasing defects.
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