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A new switching device for printed electronics: inkjet-printed microelectromechanical relay.
Eung Seok Park1, Yenhao Chen, Tsu-Jae King Liu
1Department of Electrical Engineering and Computer Sciences, University of California at Berkeley , Berkeley, California 94720-1770 United States.
Nano Letters
|October 5, 2013
Summary
Researchers developed novel inkjet-printed microelectromechanical (MEM) switches, avoiding semiconductors for low-cost electronics. These printed MEM switches offer abrupt switching, low resistance, and minimal leakage for practical applications.
Area of Science:
- Materials Science
- Electrical Engineering
- Nanotechnology
Background:
- Printed electronics aim for low-cost, large-area systems using solution-processed materials.
- Current printed transistors face performance limitations due to semiconductor material constraints.
Purpose of the Study:
- To demonstrate an alternative approach for printed switches by eliminating semiconductor materials.
- To develop inkjet-printed microelectromechanical (MEM) switches using metallic nanoparticle inks.
Main Methods:
- Fabrication of three-dimensional cantilever structures using solution-processed metallic nanoparticles.
- Utilization of sacrificial polymer layers in a novel process scheme.
- Inkjet printing of metallic nanoparticle-based inks to create mechanical switches.
Main Results:
- First demonstration of inkjet-printed MEM switches.
- Achieved abrupt switching characteristics.
- Exhibited very low on-state resistance (~10 Ω) and minimal off-state leakage.
Conclusions:
- Printed MEM switches offer a viable alternative to semiconductor-based printed transistors.
- This approach bypasses semiconductor limitations, enabling practical printed electronics.
- The developed technology presents an attractive pathway for low-cost, large-area electronic systems.

