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Related Experiment Video

Updated: May 6, 2026

Fabrication of Silica Ultra High Quality Factor Microresonators
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Athermal silicon microring resonators with titanium oxide cladding.

Biswajeet Guha, Jaime Cardenas, Michal Lipson

    Optics Express
    |November 13, 2013
    PubMed
    Summary
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    We developed a new silicon optical device that is insensitive to temperature changes. By using titanium oxide cladding, we precisely balanced optical properties for stable performance over a 35-degree range.

    Area of Science:

    • Photonics and Materials Science
    • Integrated Optics
    • Semiconductor Devices

    Background:

    • Silicon photonics offer great potential but are limited by the thermo-optic (TO) effect of silicon.
    • Existing temperature compensation methods often add complexity or reduce performance.
    • A need exists for passively temperature-insensitive silicon-based optical devices.

    Purpose of the Study:

    • To present a novel CMOS-compatible approach for creating passively temperature-insensitive silicon optical devices.
    • To engineer optical mode confinement for precise cancellation of thermo-optic effects.
    • To demonstrate the robust operational stability of the developed device across a temperature range.

    Main Methods:

    • Utilizing titanium oxide (TiO2) as a cladding material, leveraging its negative thermo-optic (TO) effect.

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  • Precisely engineering the mode confinement within both silicon (Si) and TiO2 layers.
  • Balancing the positive TO effect of Si with the negative TO effect of TiO2.

    • Main Results:

    • Achieved exact cancellation of the thermo-optic effect through careful engineering of mode confinement.
    • Demonstrated robust operation of the silicon-based optical device.
    • Verified stable performance over a temperature variation of 35 degrees Celsius.

    Conclusions:

    • The novel approach using TiO2 cladding effectively renders silicon optical devices passively temperature-insensitive.
    • This method provides a CMOS-compatible solution for stable photonic integrated circuits.
    • The demonstrated device robustness opens avenues for reliable optical communication and sensing applications.