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3D Depth Profile Reconstruction of Segregated Impurities Using Secondary Ion Mass Spectrometry
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Charge compensation for imaging large insulating samples by using secondary ion tandem mass spectrometry

R T Short1, J M McMahon, W M Holland

  • 1Oak Ridge National Laboratory, Building 5510, MS-6365, P.0. Box 2008, 37831-6365, Oak Ridge, TN.

Journal of the American Society for Mass Spectrometry
|November 15, 2013
PubMed

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