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Updated: May 3, 2026

Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
Published on: July 5, 2016
Applicability of time-averaged holography for micro-electro-mechanical system performing non-linear oscillations
Paulius Palevicius1, Minvydas Ragulskis2, Arvydas Palevicius3
1Department of Mathematical Research in Systems, Kaunas University of Technology, Studentu st. 50-222, Kaunas LT-51368, Lithuania. paulius.palevicius@ktu.lt.
Abstract:
Optical investigation of movable microsystem components using time-averaged holography is investigated in this paper. It is shown that even a harmonic excitation of a non-linear microsystem may result in an unpredictable chaotic motion. Analytical results between parameters of the chaotic oscillations and the formation of time-averaged fringes provide a deeper insight into computational and experimental interpretation of time-averaged MEMS holograms.
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