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Robust white-light interferometric sensing system for fast displacement measurement.
Applied Optics
|February 12, 2014
Summary
This study presents a fast white-light interferometric sensing system for displacement measurement. A real-time algorithm enables rapid, high-resolution measurements up to 200 μm with 3 nm resolution.
Area of Science:
- Optics and Photonics
- Metrology
- Sensor Technology
Background:
- Traditional white-light interferometric systems often rely on post-processing, limiting measurement speed.
- Accurate and rapid displacement measurement is crucial in various scientific and industrial applications.
Purpose of the Study:
- To develop a robust white-light interferometric sensing system capable of fast displacement measurement.
- To enhance the speed of interferometric sensing systems beyond standard post-processing techniques.
Main Methods:
- Implementation of a real-time algorithm based on a modified centroid algorithm.
- Generation of an error signal proportional to the optical path difference (OPD).
- Utilizing a piezo bimorph actuator (PBA) for fast coherence zone scanning and object tracking.
Main Results:
- Achieved an overall system bandwidth of nearly 10 Hz.
- Demonstrated a sensor full-scale range of 200 μm.
- Obtained a measurement resolution of 3 nm.
Conclusions:
- The developed real-time algorithm significantly increases the speed of white-light interferometric displacement measurement.
- The system offers high precision and a substantial measurement range, suitable for dynamic applications.
- The PBA effectively tracks object displacement, enabling real-time voltage signal proportionality to measured displacement.
