Jove
Visualize
Contact Us
JoVE
x logofacebook logolinkedin logoyoutube logo
ABOUT JoVE
OverviewLeadershipBlogJoVE Help Center
AUTHORS
Publishing ProcessEditorial BoardScope & PoliciesPeer ReviewFAQSubmit
LIBRARIANS
TestimonialsSubscriptionsAccessResourcesLibrary Advisory BoardFAQ
RESEARCH
JoVE JournalMethods CollectionsJoVE Encyclopedia of ExperimentsArchive
EDUCATION
JoVE CoreJoVE BusinessJoVE Science EducationJoVE Lab ManualFaculty Resource CenterFaculty Site
Terms & Conditions of Use
Privacy Policy
Policies

Related Experiment Video

Updated: May 2, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
15:04

Picometer-Precision Atomic Position Tracking through Electron Microscopy

Published on: July 3, 2021

7.5K

Nanostep height measurement via spatial mode projection.

N Hermosa, C Rosales-Guzmán, S F Pereira

    Optics Letters
    |February 25, 2014
    PubMed
    Summary

    This study presents a novel optical method for precisely measuring nanolayer thickness using light beam spatial modes. The technique achieves picometer-scale accuracy, enabling the detection of sub-10 nm step heights with high sensitivity.

    Related Concept Videos

    You might also read

    Related Articles

    Articles linked to this work by shared authors, journal, and citation graph.

    Sort by
    Same author

    Entangled two-photon states in the helical Mathieu-Gauss modes basis.

    Optics letters·2025
    Same author

    Broadband coherent Fourier scatterometry: A two-pulse approach.

    The Review of scientific instruments·2025
    Same author

    Dynamics of multisystem inflammatory syndrome in children associated to COVID-19 in Chile: Epidemiologic trends during pandemic, before and after children vaccination.

    Vaccine·2024
    Same author

    Transversal optical singularity induced precision measurement of step-nanostructures.

    Optics express·2023
    Same author

    Optical singularity assisted method for accurate parameter detection of step-shaped nanostructure in coherent Fourier scatterometry.

    Optics express·2022
    Same author

    Direct detection of polystyrene equivalent nanoparticles with diameter of 21 nm (∼λ/19) using coherent Fourier scatterometry: erratum.

    Optics express·2022

    Area of Science:

    • Optics and Photonics
    • Materials Science
    • Metrology

    Background:

    • Accurate measurement of thin nanolayers is crucial for advanced material characterization.
    • Existing techniques face limitations in sensitivity and precision for sub-10 nm structures.

    Purpose of the Study:

    • To develop and demonstrate a novel optical scheme for high-precision nanolayer thickness measurement.
    • To enhance the signal-to-noise ratio for increased detection sensitivity.

    Main Methods:

    • Utilizing spatial modes of a light beam reflected from the sample surface.
    • Projecting the reflected beam onto a specifically designed spatial mode.
    • Employing interferometric principles for precise height determination.

    Main Results:

    • Successfully measured step heights smaller than 10 nm (1/80th of the wavelength).
    • Achieved a standard error on the measurement in the picometer scale.
    • Demonstrated enhanced signal-to-noise ratio leading to increased detection sensitivity.

    Conclusions:

    • The developed optical scheme offers unprecedented precision for nanolayer thickness metrology.
    • The technique's high sensitivity makes it suitable for detecting subnanometric layer thicknesses.
    • This method holds significant potential for applications in nanotechnology and semiconductor manufacturing.

    More Related Videos

    Atomically Traceable Nanostructure Fabrication
    12:35

    Atomically Traceable Nanostructure Fabrication

    Published on: July 17, 2015

    8.3K
    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
    10:28

    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

    Published on: July 5, 2016

    9.5K

    Related Experiment Videos

    Last Updated: May 2, 2026

    Picometer-Precision Atomic Position Tracking through Electron Microscopy
    15:04

    Picometer-Precision Atomic Position Tracking through Electron Microscopy

    Published on: July 3, 2021

    7.5K
    Atomically Traceable Nanostructure Fabrication
    12:35

    Atomically Traceable Nanostructure Fabrication

    Published on: July 17, 2015

    8.3K
    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization
    10:28

    Compact Lens-less Digital Holographic Microscope for MEMS Inspection and Characterization

    Published on: July 5, 2016

    9.5K