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How to Ignite an Atmospheric Pressure Microwave Plasma Torch without Any Additional Igniters
Published on: April 16, 2015
Development of microwave ion source for industrial applications
N Takahashi1, H Murata1, H Mitsubori1
1Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
Abstract:
A microwave ion source is one of the long-life ion sources. In this paper, we report on the characteristics of the extracted Ar ion beam produced by a microwave ion source under various conditions, in terms of magnetic flux distribution and mass flow, and the stability of the ion beam. The measured spectra show that, under the experimental condition, almost all of produced ions were Ar(+) ions. For more than 6 h, the ion beam was stable.
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