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Development of microwave ion source for industrial applications
N Takahashi1, H Murata1, H Mitsubori1
1Sumitomo Heavy Industries, Ltd., 19 Natsushima-cho, Yokosuka, Kanagawa 237-8555, Japan.
The Review of Scientific Instruments
|March 6, 2014
Summary
This study details the stable, long-life performance of a microwave ion source producing Argon (Ar) ion beams. Researchers confirmed the beam
Area of Science:
- Plasma physics
- Ion source technology
- Atomic and molecular physics
Background:
- Microwave ion sources offer long operational lifetimes.
- Understanding Ar ion beam characteristics is crucial for applications.
Purpose of the Study:
- To characterize the extracted Ar ion beam from a microwave ion source.
- To investigate the influence of magnetic flux and mass flow on beam properties.
- To assess the long-term stability of the Ar ion beam.
Main Methods:
- Experimental analysis of Ar ion beam production.
- Varying magnetic flux distribution and mass flow rates.
- Spectroscopic measurement of ion composition.
- Long-duration stability testing.
Main Results:
- The microwave ion source predominantly produced Ar(+) ions under experimental conditions.
- The Ar ion beam exhibited stable characteristics for over 6 hours.
- Beam properties were analyzed concerning magnetic flux and mass flow.
Conclusions:
- The microwave ion source demonstrates reliable performance for Ar(+) ion beam generation.
- The source is suitable for applications requiring stable, long-duration ion beams.
- Further optimization based on magnetic flux and mass flow is possible.
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