Related Experiment Video
Updated: May 2, 2026

Method for Simultaneous fMRI/EEG Data Collection during a Focused Attention Suggestion for Differential Thermal Sensation
Published on: January 5, 2014
An integrated thermal compensation system for MEMS inertial sensors
Sheng-Ren Chiu1, Li-Tao Teng2, Jen-Wei Chao3
1Microsystems Technology Center, Industrial Technology Research Institute, Tainan 709, Taiwan. samuel.csr@itri.org.tw.
Abstract:
An active thermal compensation system for a low temperature-bias-drift (TBD) MEMS-based gyroscope is proposed in this study. First, a micro-gyroscope is fabricated by a high-aspect-ratio silicon-on-glass (SOG) process and vacuum packaged by glass frit bonding. Moreover, a drive/readout ASIC, implemented by the 0.25 µm 1P5M standard CMOS process, is designed and integrated with the gyroscope by directly wire bonding. Then, since the temperature effect is one of the critical issues in the high performance gyroscope applications, the temperature-dependent characteristics of the micro-gyroscope are discussed. Furthermore, to compensate the TBD of the micro-gyroscope, a thermal compensation system is proposed and integrated in the aforementioned ASIC to actively tune the parameters in the digital trimming mechanism, which is designed in the readout ASIC. Finally, some experimental results demonstrate that the TBD of the micro-gyroscope can be compensated effectively by the proposed compensation system.
Related Concept Videos
Thermal Stress
PI Controller: Design
Mechanical Systems
Equipments Used to Measure Body Temperature
Glass-bulb Thermometer:
Glass-bulb thermometers are hollow glass tubes with a bulb tip containing liquid such as ethanol or mercury. Historically, glass bulb mercury thermometers were the standard device to measure body temperature. Today, mercury thermometers are prohibited in many countries due to the hazardous effects of mercury and the risk of exposure if the glass bulb breaks. In general,...
Thermal expansion and Thermal stress: Problem Solving
To solve the problem, first, identify the known and unknown quantities. The initial length (L) of the bridge is 1275 m, the coefficient of linear expansion (α) for steel is 12 x 10-6/°C, and the change in temperature (ΔT) is 55...
Temperature and Thermal Equilibrium
The concept of temperature has evolved from the common concepts of hot and cold. The scientific definition of temperature explains more than just our sense of hot and cold. Temperature is operationally defined as the quantity measured with a thermometer. Furthermore, temperature is...

