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    Testing fine-ground surfaces at grazing incidence causes distortion. This study presents a diffractive solution to correct anamorphic distortion, enabling sharp imaging of the entire sample length for precise surface analysis.

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    Area of Science:

    • Optical Engineering
    • Metrology
    • Surface Science

    Background:

    • Interferometric testing of fine-ground plane surfaces is crucial for quality control.
    • Grazing incidence angles (near 90°) are required for micrometer-range roughness testing.
    • High incidence angles introduce significant anamorphic distortion in imaging detectors.

    Purpose of the Study:

    • To address the challenge of anamorphic distortion in grazing incidence interferometry.
    • To develop a diffractive optical solution for precise surface testing.
    • To achieve sharp imaging of the entire sample length without distortion.

    Main Methods:

    • Utilizing diffractive optical elements for grazing incidence testing.
    • Implementing a diffractive grazing incidence solution.
    • Developing methods for anamorphic distortion rectification.
    • Matching illuminating and imaging beam cross-sections to sample dimensions.

    Main Results:

    • Successfully rectified anamorphic distortion in grazing incidence testing.
    • Achieved sharp imaging of the whole length of the test sample.
    • Demonstrated effective matching of beam cross-sections to sample lateral extension.

    Conclusions:

    • A diffractive grazing incidence approach effectively corrects anamorphic distortion.
    • This method enables accurate interferometric testing of fine-ground surfaces.
    • The solution enhances precision in surface metrology for micrometer-range roughness.