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Updated: May 1, 2026

Fabrication and Testing of Photonic Thermometers
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Ultra-sensitive chip-based photonic temperature sensor using ring resonator structures.

Haitan Xu, Mohammad Hafezi, J Fan

    Optics Express
    |March 26, 2014
    PubMed
    Summary
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    Silicon photonic temperature sensors offer improved stability over resistance thermometers. These optical ring resonator devices can detect temperature differences as small as 1 millikelvin (mK), with a noise floor of 80 μK in specific modes.

    Area of Science:

    • Photonics and Metrology
    • Materials Science (Silicon-based devices)

    Background:

    • Traditional resistance thermometry faces fundamental limitations.
    • Photonic temperature sensors offer potential for enhanced mechanical and environmental stability.
    • Advances in frequency metrology enable new sensing capabilities.

    Purpose of the Study:

    • To investigate the performance of silicon-based optical ring resonator devices for temperature sensing.
    • To compare the sensitivity of different measurement methodologies (wavelength scanning vs. constant power).
    • To establish a new benchmark for photonic temperature sensor resolution.

    Main Methods:

    • Fabrication of silicon-based optical ring resonator devices.
    • Temperature difference measurement using wavelength scanning methodology.

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  • Temperature difference measurement using side-of-fringe, constant power mode.

    • Main Results:

    • Demonstrated resolution of temperature differences as low as 1 millikelvin (mK) using wavelength scanning.
    • Achieved a significantly lower noise floor of 80 microkelvin (μK) for temperature difference measurement in constant power mode.
    • Highlighted the potential of silicon photonic devices for high-precision thermometry.

    Conclusions:

    • Silicon-based optical ring resonators are effective photonic temperature sensors.
    • The constant power measurement mode offers superior sensitivity and a lower noise floor.
    • These devices represent a promising alternative to traditional resistance thermometry for demanding applications.