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Updated: May 1, 2026
07:51
Fabrication of Silica Ultra High Quality Factor Microresonators
Published on: July 2, 2012
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Inverted-wedge silica resonators for controlled and stable coupling.
Optics Letters
|April 2, 2014
Summary
Researchers created silica microresonators with high quality factors (>10^6). They demonstrated stable, controllable optical coupling by moving a fiber taper, enabling precise tuning between undercoupling and overcoupling regimes.
Area of Science:
- Photonics and Optical Engineering
- Materials Science
Background:
- Microresonators are key components in photonic integrated circuits.
- Achieving stable and tunable optical coupling is crucial for device performance.
Purpose of the Study:
- To fabricate silica microresonators with high quality factors.
- To demonstrate controllable optical coupling using a fiber taper.
- To investigate the impact of resonator geometry on coupling stability.
Main Methods:
- Fabrication of inverted-wedge silica microresonators using semiconductor methods.
- Characterization of optical quality factors at 1550 nm wavelength.
- Dynamic control of fiber taper position for coupling regime adjustment.
Main Results:
- Achieved quality factors exceeding 10^6.
- Demonstrated tunable coupling from undercoupling to overcoupling.
- Identified the critical coupling point through precise fiber taper manipulation.
- Observed robust and stable coupling due to the resonator's structural support.
Conclusions:
- Inverted-wedge silica microresonators offer high performance and stable coupling.
- The fabrication method is compatible with conventional semiconductor processes.
- Controllable coupling is feasible, enhancing the utility of microresonators in photonic systems.
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