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Updated: Apr 29, 2026

Picometer-Precision Atomic Position Tracking through Electron Microscopy
Published on: July 3, 2021
High-precision image-drift-correction method for EM images with a low signal-to-noise ratio
Shigeto Isakozawa1, Sachihiko Tomonaga2, Takahito Hashimoto1
1Naka Division, Hitachi High-Technologies Corporation, 882 Ichige, Hitachinaka, Ibaraki 312-8504, Japan.
Abstract:
The phase correlation method (PCM) is well known for high-precision matching between images. However, if the signal-to-noise ratio of an image is low, the method is difficult to apply. To solve this problem, we developed an improved PCM that can match images automatically with sub-pixel matching precision. Using this method, a 0.2-nm crystal lattice spacing was clearly revealed after 10 blurred images were processed in a verification experiment; such a lattice could not be recognized or hardly be recognized in each individual image.
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