Fabrication and characterization of well-aligned plasmonic nanopillars with ultrasmall separations

We show the fabrication of well-aligned gold and silver nanopillars with various array parameters via interference lithography followed by ion beam milling and compare the etching rates of these two metallic materials. Silver is suitable for fabricating ultrafine arrays with ultrasmall separations due to high milling rates. The optical properties of the fabricated nanopillars are specifically characterized from both normal incidence and oblique incident angles. Tunable surface plasmon resonances are achieved with varying structural parameters. Strong coupling effects are enabled when the separation between adjacent nanopillars is dramatically reduced, leading to useful applications in sensing and waveguiding.