Related Experiment Video
Updated: Apr 27, 2026

Angle-resolved Photoemission Spectroscopy At Ultra-low Temperatures
Published on: October 9, 2012
Interfacial energy-dispersive spectroscopy profile X-ray resolution measurements in variable pressure SEM
Abdelhalim Zoukel1, Lahcen Khouchaf1, Jean Di Martino2
11Univ-Lille Nord de France,Ecole des Mines de Douai,941 rue Charles Bourseul,BP 10838,59500 Douai,France.
Abstract:
A procedure has been developed to follow degradation of energy-dispersive spectroscopy (EDS) X-ray lateral resolution in a variable pressure scanning electron microscope. This procedure is based on evaluation of the EDS profile shape change for different experimental conditions. Some parameters affecting the X-ray resolution in high-vacuum mode have been taken into account. Good agreement between the simulated and experimental EDS profiles shows the reliability of the proposed procedure. A significant improvement in measurement of the EDS profile interfacial distance (DINT) has been achieved.
Related Concept Videos
Scanning Electron Microscopy
Fundamental Principles
Accelerated...
Overview of Electron Microscopy
Mass Analyzers: Overview
Electron Microscope Tomography and Single-particle Reconstruction
Electron Tomography
Electron tomography can be performed either in TEM or STEM (scanning transmission...

