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    We developed a new optical phased array chip for fast, wide-angle beam steering. This technology is ideal for cost-effective Light Detection and Ranging (LIDAR) systems.

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    Area of Science:

    • Photonics and Optical Engineering
    • Integrated Optics
    • Semiconductor Device Fabrication

    Background:

    • Optical phased arrays (OPAs) are crucial for beam steering applications.
    • Existing OPA technologies face limitations in steering range, speed, and cost.
    • CMOS-compatible fabrication is desired for scalable and affordable photonic devices.

    Purpose of the Study:

    • To demonstrate a novel on-chip optical phased array with continuous, wide-angle beam steering.
    • To enable cost-effective Light Detection and Ranging (LIDAR) systems.
    • To showcase a versatile design adaptable to various wavelengths.

    Main Methods:

    • Fabrication of an on-chip optical phased array using a CMOS-compatible process.
    • Implementation of a cascaded phase shifting architecture with thermo-optic phase shifters.
    • Testing and characterization of beam-steering capabilities in the telecom C-band.

    Main Results:

    • Achieved the widest beam-steering range (51°) and beam-spacing to date.
    • Demonstrated continuous beam steering over the entire 51° range.
    • Attained fast beam-steering speeds of 100 kHz with low power consumption.
    • Verified suitability for LIDAR applications and adaptability for wavelengths from 1.2 to 3.5 μm.

    Conclusions:

    • The demonstrated on-chip optical phased array offers unprecedented wide-angle and continuous beam steering.
    • The CMOS-compatible fabrication and thermo-optic phase shifters enable low-cost, high-performance LIDAR.
    • This technology provides a versatile platform for various photonic applications across a broad wavelength spectrum.