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Updated: Apr 24, 2026

Fabrication of 3D Carbon Microelectromechanical Systems C-MEMS
Published on: June 17, 2017
Sensing and identification of carbon monoxide using carbon films fabricated by methane arc discharge decomposition
Elnaz Akbari1, Zolkafle Buntat2, Aria Enzevaee3
1Centre for Artificial Intelligence and Robotics (CAIRO), Universiti Teknologi Malaysia, Kuala Lumpur 54100, Malaysia.
Abstract:
Carbonaceous materials have recently received attention in electronic applications and measurement systems. In this work, we demonstrate the electrical behavior of carbon films fabricated by methane arc discharge decomposition technique. The current-voltage (I-V) characteristics of carbon films are investigated in the presence and absence of gas. The experiment reveals that the current passing through the carbon films increases when the concentration of CO2 gas is increased from 200 to 800 ppm. This phenomenon which is a result of conductance changes can be employed in sensing applications such as gas sensors.
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