Cryogenic electron beam induced chemical etching

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Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy
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Nanoscale Characterization of Liquid-Solid Interfaces by Coupling Cryo-Focused Ion Beam Milling with Scanning Electron Microscopy and Spectroscopy

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Aiden A Martin1, Milos Toth

  • 1School of Physics and Advanced Materials, University of Technology, Sydney , 15 Broadway, Ultimo, New South Wales 2007, Australia.

ACS Applied Materials & Interfaces
|October 22, 2014
PubMed

Keywords:
electron beam induced etchingnanofabricationnitrogen trifluoridereaction kineticssiliconsurface chemistry

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